Work

Mechanisms Involved in the Conversion of ppHMDSO Films into SiO2‐Like by Oxygen Plasma Treatment

Year: 2006

Type: article

Source: Plasma Processes and Polymers

DOI: 10.1002/ppap.200600022

Authors: Agnès Granier, Gael Borvon, Angélique Bousquet, Antoine Goullet, Christiane Leteinturier, Arie van der Lee

Institutions: Centre National de la Recherche Scientifique, Institut des Matériaux Jean Rouxel, Université de Nantes, Nantes Université, Institut Européen des Membranes

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2000465086

FWCI: 1.312

Cites: 18

Cited by: 24

Related to: 10