Work

Observation of ion bombardment damage in silicon

Year: 1968

Type: article

Source: Philosophical magazine

DOI: 10.1080/14786436808223192

Authors: D. J. Mazey, R. S. Nelson, R. S. Barnes

Institution: United Kingdom Atomic Energy Authority

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2000487423

FWCI: 27.43

Cites: 9

Cited by: 222

Related to: 10