Work

Heuristics for truncating the number of optical kernels in Hopkins image calculations for model-based OPC treatment

Year: 2007

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.712625

Authors: Christian Zuniga, Edita Tejnil

Institution: ASML (United States)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2000536832

FWCI: 2.008

Cites:

Cited by: 7

Related to: 10