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Excimer laser cleaning for microelectronics: modeling, applications, and challenges

Year: 1999

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.352691

Authors: Michel Meunier, Xiaoguang Wu, Felix Beaudoin, Edward Sacher, Martine Simard-Normandin

Institutions: Polytechnique Montréal, Nortel (Canada)

Language: English

Topic: Laser Material Processing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2000567401

FWCI:

Cites:

Cited by: 5

Related to: 10