Work

Stress control in reactively sputtered AlN and TiN films

Year: 1987

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/1.574480

Authors: G. Este, W. D. Westwood

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2000613422

FWCI: 5.731

Cites:

Cited by: 89

Related to: 10