Work

Polymer microreplication using ultrasonic vibration energy

Year: 2009

Type: article

Source: Journal of Micro/Nanopatterning Materials and Metrology

DOI: 10.1117/1.3129824

Authors: Hyun Woo Yu, Chi Hoon Lee, Phill Gu Jung, Bosung Shin, Joon-Ho Kim, Kyu-Youn Kwang, Jong Soo Ko

Institutions: Pusan National University, Samsung (South Korea), Samsung Advanced Institute of Technology (South Korea)

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2000657506

FWCI: 1.313

Cites: 19

Cited by: 24

Related to: 10