Work

Multi-Wavelength Raman and Photoluminescence Characterization of Implanted Silicon Before and After Rapid Thermal Annealing

Year: 2011

Type: conference-paper

Source: AIP conference proceedings

DOI: 10.1063/1.3548350

Authors: Woo Sik Yoo, Takeshi Ueda, Toshikazu Ishigaki, Kitaek Kang, Jiro Matsuo, Masataka Kase, Takaaki Aoki, Toshio Seki

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2000665748

FWCI: 5.771

Cites: 1

Cited by: 8

Related to: 10