Work

Electrical properties and thermal stability of Pd-doped copper nitride films

Year: 2013

Type: article

Source: Journal of Applied Physics

DOI: 10.1063/1.4788905

Authors: A. L. Ji, N. P. Lu, L. Gao, W. B. Zhang, L. G. Liao, Z. X. Cao

Institution: Institute of Physics

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Awards: 三维限制微管谐振腔对硅纳米颗粒光增益的调制, G2839222571, 大温区内恒电阻率单一固体探索, 氮化铜结构的金属原子选择占位掺杂问题研究, G7575419745, G7589056513

OpenAlex ID: W2000685513

FWCI: 1.968

Cites: 23

Cited by: 38

Related to: 10