Work

Ambient Low Temperature Plasma Etching of Polymer Films for Secondary Ion Mass Spectrometry Molecular Depth Profiling

Year: 2012

Type: article

Source: Analytical Chemistry

DOI: 10.1021/ac302718u

Authors: Shin Muramoto, Matthew E. Staymates, Tim M. Brewer, Greg Gillen

Institution: National Institute of Standards and Technology

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2000714756

FWCI: 0.95

Cites: 23

Cited by: 5

Related to: 10