Work

The fabrication of silicon-based PZT microstructures using an aerosol deposition method

Year: 2008

Type: article

Source: Journal of Micromechanics and Microengineering

DOI: 10.1088/0960-1317/18/5/055034

Authors: Xuan-Yu Wang, Chi-Yuan Lee, Yuh-Chung Hu, Wen-Pin Shih, Chih-Cheng Lee, Jung-Tang Huang, Pei-Zen Chang

Institutions: National Taiwan University, National Taipei University of Technology, Yuan Ze University, Huafan University

Language: English

Topic: Ferroelectric and Piezoelectric Materials

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Council, Industrial Technology Research Institute, National Taiwan University

OpenAlex ID: W2000719042

FWCI: 0.595

Cites: 23

Cited by: 23

Related to: 10