Work

Continuous-relief diffractive optical elements for two-dimensional array generation

Year: 1993
Type: article
Abstract: Continuous surface-relief diffractive optical elements for two-dimensional array generation (fan-out) are designed and fabricated. Separable and nonseparable solutions for the two-dimensional element design are compared. The phase-grating microstructures are generated by laser-beam writing lithography in a single exposure step and converted to nickel shims by electroplating, enabling low-cost replicas to be produced by using laboratory and commercial replication processes. Results are presented for a 9 x 9 fan-out diffractive optical element with a measured efficiency of 94% and an overall uniformity within +/-8%; replicas in epoxy have the same efficiency and a uniformity of +/-15%.
Language: English
Open Access status: green
OpenAlex ID: W2000809325
FWCI: 8.525
Cites: 11
Cited by: 77
Related to: 10