Work

Sub-micron resolution CT for failure analysis and process development

Year: 2008

Type: article

Source: Measurement Science and Technology

DOI: 10.1088/0957-0233/19/9/094001

Authors: M Feser, J Gelb, H Chang, H Cui, F Duewer, S H Lau, A Tkachuk, W Yun

Language: English

Topic: Advanced X-ray Imaging Techniques

Subfield: Radiation

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2000881411

FWCI: 4.378

Cites: 14

Cited by: 106

Related to: 10