Work

iTIRM as a tool for qualifying polishing processes

Year: 2002

Type: article

Source: Applied Optics

DOI: 10.1364/ao.41.004036

Authors: Oliver W. Fähnle, Torsten Wons, Evelyn Koch, Sebastién Debruyne, Mark Meeder, Silvia M. Booij, Joseph J. M. Braat

Institutions: FISBA OPTIK (Switzerland), Delft University of Technology

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2001072012

FWCI: 2.294

Cites: 3

Cited by: 29

Related to: 10