Work

A review of the present state of art in hard coatings grown from the vapor phase

Year: 1986

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/1.574062

Authors: J.-E. Sundgren, H. T. G. Hentzell

Institution: Linköping University

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2001120318

FWCI: 26.22

Cites:

Cited by: 489

Related to: 10