Work

Self-aligned tip deinsulation of atomic layer deposited Al2O3and parylene C coated Utah electrode array based neural interfaces

Year: 2014

Type: article

Abstract: . Tip impedances were in the ranges of 20 to 50 kΩ, with median of 32 KΩ and standard deviation of 30 kΩ, showing the effectiveness of the self-aligned deinsulation process for alumina and Parylene C bi-layer encapsulation. The relatively uniform tip impedance values demonstrated the consistency of tip exposures.

Source: Journal of Micromechanics and Microengineering

DOI: 10.1088/0960-1317/24/3/035003

Authors: Xianzong Xie, Loren Rieth, Sandeep Negi, Rajmohan Bhandari, Ryan Caldwell, Rohit Sharma, Prashant Tathireddy, Florian Solzbacher

Institutions: University of Utah, Blackrock Microsystems (United States)

Language: English

Topic: Neuroscience and Neural Engineering

Subfield: Cellular and Molecular Neuroscience

Field: Neuroscience

Domain: Life Sciences

Open Access status: green

Funders: U.S. Department of Defense, National Institutes of Health, Defense Advanced Research Projects Agency, National Institute of Neurological Disorders and Stroke

Awards: G1860262917, Next generation wireless neural interfaces for chronic and acute applications

OpenAlex ID: W2002137182

FWCI: 0.671

Cites: 47

Cited by: 12

Related to: 10