Work

Studies on SiC, DLC and TiO2 thin films as piezoresistive sensor materials for high temperature application

Year: 2012

Type: article

Source: Microsystem Technologies

DOI: 10.1007/s00542-012-1435-y

Authors: M. A. Fraga, H. Furlan, R. S. Pessoa, L. A. Rasia, C. F. R. Mateus

Institutions: Instituto Tecnológico de Aeronáutica, Department of Aerospace Science and Technology, Universidade de São Paulo, Faculdade de Tecnologia de São Paulo, Universidade do Vale do Paraíba

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Fundação de Amparo à Pesquisa do Estado de São Paulo, Fundação de Amparo à Pesquisa do Estado do Rio Grande do Sul

OpenAlex ID: W2002202517

FWCI: 2.201

Cites: 35

Cited by: 39

Related to: 10