Work

Analysis of Oxidized Copper Surface and its Evolution

Year: 2012

Type: article

Source: Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena

DOI: 10.4028/www.scientific.net/ssp.195.119

Authors: Francesca Milanesi, Francesco Pipia, Simona Spadoni, Salvo Grasso, Enrica Ravizza, Mario Pistoni, Mauro Alessandri

Institutions: STMicroelectronics (Italy), Micron (Italy)

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2002251073

FWCI:

Cites: 6

Cited by: 2

Related to: 10