Work

Dry etching for the fabrication of flat panel displays

Year: 1995

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.207515

Authors: Curt Barratt, David J. Johnson, Chris Constantine

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2002854597

FWCI:

Cites:

Cited by: 1

Related to: 10