Work

Analysis of organic contaminants from silicon wafer and disk surfaces by thermal desorption-GC-MS

Year: 1999

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.343711

Authors: Mark J. Camenzind, Latif Ahmed, Anurag Kumar

Language: English

Topic: Analytical Chemistry and Chromatography

Subfield: Analytical Chemistry

Field: Chemistry

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2003010937

FWCI: 2.393

Cites:

Cited by: 5

Related to: 10