Work

Platinum gettering in silicon by silicon phosphide precipitates

Year: 1996

Type: article

Source: Journal of Applied Physics

DOI: 10.1063/1.361040

Authors: A. Correia, B. Pichaud, A. Lhorte, J. B. Quoirin

Institutions: Centre National de la Recherche Scientifique, Aix-Marseille Université, Université Aix-Marseille-III

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2003107173

FWCI: 0.299

Cites: 18

Cited by: 22

Related to: 10