Work

Hydrogen etch of GaN and its application to produce porous GaN caves

Year: 2011

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.874422

Authors: Yen-Hsien Yeh, Ying-Chia Hsu, Yin-Hao Wu, Kuei-Ming Chen, Wei-I Lee

Institution: National Yang Ming Chiao Tung University

Language: English

Topic: GaN-based semiconductor devices and materials

Subfield: Condensed Matter Physics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2003107955

FWCI: 0.902

Cites: 14

Cited by: 4

Related to: 10