Work

Silicon accelerometer based on thermopiles

Year: 1995

Type: article

Source: Sensors and Actuators A Physical

DOI: 10.1016/0924-4247(94)00890-t

Authors: U.A. Dauderstädt, P.H.S. de Vries, R. Hiratsuka, P.M. Sarro

Institutions: Delft University of Technology, Nippon Steel (Japan)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2003113054

FWCI: 3.228

Cites: 6

Cited by: 71

Related to: 10