Work

Heat resistance of EUV multilayer mirrors for long-time applications

Year: 2001

Type: article

Source: Microelectronic Engineering

DOI: 10.1016/s0167-9317(01)00530-5

Authors: T Feigl, H Lauth, S Yulin, N Kaiser

Institutions: Fraunhofer Institute for Applied Optics and Precision Engineering, Jenoptik (Germany)

Language: English

Topic: Optical Coatings and Gratings

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2003186771

FWCI: 1.906

Cites: 10

Cited by: 31

Related to: 10