Work

Performance of the NEC production high energy implantation system

Year: 1987

Type: article

Source: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

DOI: 10.1016/s0168-583x(87)80249-5

Authors: G.A. Norton, G.M. Klody, R.L. Loger

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2003268296

FWCI: 0.346

Cites:

Cited by: 1

Related to: 10