Work

Method for measurement of transferred power to plasma in inductive discharges

Year: 2013

Type: article

Source: Thin Solid Films

DOI: 10.1016/j.tsf.2013.05.114

Authors: Hye-Ju Hwang, Young-Cheol Kim, Chin-Wook Chung

Institution: Hanyang University

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2003287019

FWCI:

Cites: 17

Cited by: 8

Related to: 10