Impact of particles in ultra pure water on random yield loss in IC production
Year: 2008
Type: article
Source: Microelectronic Engineering
Authors: Faisal Wali, D. Martin Knotter, Auke Mud, Fred G. Kuper
Institutions: University of Twente, NXP (Netherlands)
Language: English
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2004656877