Work

Application of SLMs for optical metrology

Year: 2001

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.447740

Authors: Hans J. Tiziani, Tobias Haist, J. Liesener, M. Reicherter, L. Seifert

Institution: University of Stuttgart

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2004668438

FWCI: 1.044

Cites:

Cited by: 8

Related to: 10