Work

Improvements in the EQ-10 electrodeless Z-pinch EUV source for metrology applications

Year: 2011

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.880794

Authors: Stephen F. Horne, Deborah Gustafson, Matthew J. Partlow, Matthew M. Besen, Donald K. Smith, Paul A. Blackborow

Institution: Energetiq Technology (United States)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2005016216

FWCI: 0.424

Cites: 11

Cited by: 3

Related to: 10