Work

Coaxial Impact-Collision Ion Scattering Spectroscopy and Time-of-Flight Elastic Recoil Detection Analysis for In Situ Monitoring of Surface Processes in Gas Phase Atmosphere

Year: 2001

Type: article

Abstract: Based on conventional coaxial impact-collision ion scattering spectroscopy (CAICISS) and time-of-flight elastic recoil detection analysis (TOF-ERDA), we have developed a novel ion scattering and recoiling spectrometer equipped with a differential pumping system for in situ monitoring of surface processes in gas phase atmosphere in the pressure regime up to 10-4 Torr. In order to demonstrate the performance of this apparatus, we have applied it to real-time monitoring of Ge thin film growth on a Si(001) surface in atomic hydrogen (H) atmosphere. The morphology of Ge thin films and H coverage on the growth front during the growth in H atmosphere were successfully observed.

Source: Japanese Journal of Applied Physics

DOI: 10.1143/jjap.40.l576

Authors: Mitsuhiro Katayama, Toshiaki Fujino, Yujin Yamazaki, Shin-ichi Inoue, Jeong-Tak Ryu, Kenjiro Oura

Institutions: The University of Osaka, Daegu University

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: bronze

Funder: Ministry of Education, Culture, Sports, Science and Technology

OpenAlex ID: W2005109545

FWCI: 1.271

Cites: 16

Cited by: 7

Related to: 10