Work

Ionized-cluster beam deposition and epitaxy as fabrication techniques for electron devices

Year: 1977

Type: article

Source: Thin Solid Films

DOI: 10.1016/0040-6090(77)90248-6

Authors: Toshinori Takagi, Isao Yamada, Akio Sasaki

Institution: Kyoto University

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2005116376

FWCI: 5.084

Cites: 5

Cited by: 50

Related to: 10