Effects of vacuum ultraviolet radiation on deposited and ultraviolet-cured low-k porous organosilicate glass
Year: 2011
Type: article
DOI: 10.1116/1.3570818
Authors: H. Sinha, G. A. Antonelli, G. Jiang, Y. Nishi, J. L. Shohet
Institutions: University of Wisconsin–Madison, Stanford University
Language: English
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2005161726