Work

Japanese ultimate flatness interferometer (FUJI) and its preliminary experiment

Year: 2001

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.445643

Authors: Toshiyuki Takatsuji, Nobuaki Ueki, Kenichi Hibino, Sonko Osawa, Tomizo Kurosawa

Institutions: National Institute of Advanced Industrial Science and Technology, Fujifilm (Japan)

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2005168301

FWCI: 0.948

Cites:

Cited by: 15

Related to: 10