Work

Embedded purification for electron beam induced Pt deposition using MeCpPtMe3

Year: 2015

Type: article

Source: Nanotechnology

DOI: 10.1088/0957-4484/26/9/095303

Authors: E Villamor, F Casanova, P H F Trompenaars, J J L Mulders

Institutions: CIC nanoGUNE, Ikerbasque

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2005197195

FWCI: 3.107

Cites: 21

Cited by: 32

Related to: 10