Work

Nanometer Trench Fabricated by Atomic Force Microscopy

Year: 2004

Type: article

Source: Japanese Journal of Applied Physics

DOI: 10.1143/jjap.43.1660

Authors: Tokio Yukiya, Kouji Aizawa, Chugo Fujihashi

Institution: Tokyo Polytechnic University

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2005217138

FWCI: 0.238

Cites: 11

Cited by: 1

Related to: 10