Work

Plasma-assisted deposition of hard material layers from organometallic precursors

Year: 1993

Type: article

Source: Surface and Coatings Technology

DOI: 10.1016/0257-8972(93)90084-2

Authors: Ch. Täschner, K. Bartsch, A. Leonhardt

Institution: Leibniz Institute for Solid State and Materials Research

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2005289805

FWCI: 2.102

Cites: 7

Cited by: 12

Related to: 10