Work

Compositional investigation of sputtered amorphous SiOX:H

Year: 1993

Type: article

Source: Solid State Communications

DOI: 10.1016/0038-1098(93)90418-m

Authors: F. Stolze, M. Zacharias, S. Schippel, B. Garke

Institutions: Otto-von-Guericke-Universität Magdeburg, Friedrich Schiller University Jena

Language: English

Topic: Glass properties and applications

Subfield: Ceramics and Composites

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2005302942

FWCI: 3.425

Cites: 8

Cited by: 15

Related to: 10