Work

Sub-10 nm imprint lithography and applications

Year: 1997

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.589752

Authors: Stephen Y. Chou, Peter R. Krauss, Wei Zhang, Lingjie Guo, Lei Zhuang

Institutions: University of Minnesota, Princeton University

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2005485153

FWCI: 15.04

Cites: 11

Cited by: 1,113

Related to: 10