Work

Mechanical and tribological characterization of CNx films deposited by d.c. magnetron sputtering

Year: 2007

Type: article

Source: Physica status solidi. C, Conferences and critical reviews/Physica status solidi. C, Current topics in solid state physics

DOI: 10.1002/pssc.200675911

Authors: L. Ipaz, L. Yate, T. Polcar, E. Camps, L. Escobar‐Alarcon, G. Zambrano, P. Prieto

Institutions: Universidad del Valle, Czech Technical University in Prague, Instituto Nacional de Investigaciones Nucleares

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2005641740

FWCI: 0.461

Cites: 20

Cited by: 7

Related to: 10