Work

Nanoimprint lithography based selective area growth of indium phosphide nanopillar arrays on non-single-crystal templates

Year: 2013

Type: article

Source: Journal of Crystal Growth

DOI: 10.1016/j.jcrysgro.2013.10.008

Authors: Kate J. Norris, Junce Zhang, David M. Fryauf, Gary A. Gibson, Steven J. Barcelo, Nobuhiko P. Kobayashi

Institutions: Ames Research Center, University of California, Santa Cruz, Hewlett-Packard (United States)

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Semiconductor Research Corporation

OpenAlex ID: W2005651152

FWCI: 0.367

Cites: 29

Cited by: 2

Related to: 10