Work

Thickness Uniformity of Spin Coated Film Influenced by Nonuniform Temperature of Substrates

Year: 2010

Type: article

Source: International Journal of Emerging Multidisciplinary Fluid Sciences

DOI: 10.1260/1756-8315.2.4.215

Authors: Taku Ohara, Shinichiro Matsubara, Hirotoshi Kadowaki, Gota Kikugawa, Kazuhiro Takeshita, Tomoko Hamada

Institutions: Mitsubishi Heavy Industries (Japan), Tokyo Electron (Japan)

Language: English

Topic: Fluid Dynamics and Thin Films

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2005658651

FWCI:

Cites: 25

Cited by: 1

Related to: 10