Work

DC-magnetron sputtering of ZnO:Al films on (00.1)Al2O3 substrates from slip-casting sintered ceramic targets

Year: 2014

Type: article

Source: Applied Surface Science

DOI: 10.1016/j.apsusc.2014.05.225

Authors: I. Miccoli, R. Spampinato, F. Marzo, P. Prete, N. Lovergine

Institutions: University of Salento, Institute for Microelectronics and Microsystems

Language: English

Topic: ZnO doping and properties

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2006065357

FWCI: 1.078

Cites: 34

Cited by: 40

Related to: 10