Work

Synchrotron radiation stepper with new alignment system

Year: 1992

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.585920

Authors: F. Sato, K. Ito, T. Miyatake, K. Yamazaki, S. Hamada, Y. Tomita

Institution: Sumitomo Heavy Industries (Japan)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2006246176

FWCI: 1.854

Cites:

Cited by: 8

Related to: 10