Structural studies of thin silicon layers repeatedly implanted by carbon ions
Year: 2006
Type: article
Source: Physics of the Solid State
Authors: K. Kh. Nusupov, N. B. Beisenkhanov, I. V. Valitova, E. A. Dmitrieva, D. Zhumagaliuly, E. A. Shilenko
Institution: Institute of Physics and Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2006259477