Work

Applications of Pulsed Excimer Laser Deposition with a Frozen Nitrogen Target to Deposition of NbN and BN Films

Year: 1997

Type: article

Source: Japanese Journal of Applied Physics

DOI: 10.1143/jjap.36.2267

Authors: Yasushi Hiroshima, Takashi Ishiguro, Kotaro Esaki

Institutions: Kawasaki Heavy Industries (Japan), Nagaoka University of Technology

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2006533775

FWCI: 0.65

Cites: 28

Cited by: 5

Related to: 10