Work

60-nm copper lines produced by a lift-off technique with 5-keV electrons: experiment and simulation

Year: 1997

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.275877

Authors: Ulrich A. Jagdhold, Lothar Bauch, Monika Boettcher

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2006676499

FWCI: 1.3

Cites:

Cited by: 1

Related to: 10