Work

Two-dimensional profiling of shallow junctions in Si metal-oxide-semiconductor structures using scanning tunneling spectroscopy and transmission electron microscopy

Year: 1996

Type: article

Source: Journal of Applied Physics

DOI: 10.1063/1.361069

Authors: E. T. Yu, K. Barmak, P. Ronsheim, M. B. Johnson, P. McFarland, J.-M. Halbout

Institutions: University of California San Diego, Lehigh University, University of Oklahoma, IBM Research - Thomas J. Watson Research Center

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2006715167

FWCI: 2.689

Cites: 30

Cited by: 29

Related to: 10