Excimer laser deposition of silica films: a comparison between two methods
Year: 1990
Type: article
Source: Applied Surface Science
Authors: B. León, A. Klumpp, M. Pérez-Amor, H. Sigmund
Institutions: Universidade de Vigo, Fraunhofer-Gesellschaft
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2006754237