Work

SiGe HBT Device in Mixed Dry Wet Etching

Year: 2006

Type: conference-paper

Source: IEEE International Conference on Nano/Micro Engineered and Molecular Systems

DOI: 10.1109/nems.2006.334658

Authors: Daoguang Liu, Jun Xu, Shiliu Xu, Yue Hao, Peixin Qian, Zhihong Liu, Gangyi Hu, Zhengfan Zhang, Jing Zhang, Rongkan Liu, Luncai Liu, Rongqiang Li, Kaiquan He, Yukui Liu, Guangbing Chen, Ulf Koenig, Horst Kibbel, Andreas Gruhle, Ulrich Seiler, Kaicheng Li

Institutions: Tsinghua University, Xidian University, Daimler (Germany)

Language: English

Topic: Advancements in Semiconductor Devices and Circuit Design

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2007185577

FWCI: 0.53

Cites: 9

Cited by: 4

Related to: 10