Work

Electron beam direct writing of capacitor coupled GaAs FET logic circuits

Year: 1981

Type: article

Source: Journal of Vacuum Science and Technology

DOI: 10.1116/1.571188

Authors: C. Dix, P. G. Flavin, P. Hendy, M. E. Jones

Institution: BT Research

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2007339880

FWCI:

Cites:

Cited by: 1

Related to: 10