Work

Radiation effects microscopy for failure analysis of microelectronic devices

Year: 2005

Type: article

Source: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

DOI: 10.1016/j.nimb.2005.01.102

Authors: G. Vizkelethy, B.L. Doyle, D.K. Brice, P.E. Dodd, M.R. Shaneyfelt, J.R. Schwank

Institution: Sandia National Laboratories

Language: English

Topic: Radiation Effects in Electronics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2007449335

FWCI: 1.898

Cites: 22

Cited by: 36

Related to: 10